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System Components
NANO Indenter XPW testing systems include the following core components:
Indentation head
assembly
Motorized sample
manipulation table
with mouse control
Vibration isolation
table and environmental
enclosure
Optical Imaging
System
Video camera
with frame grabbing
software
Pre-mounted
diamond indentation
tip (Berkovich)
Software-controlled,
automated handset
Fully automated
data acquisition
and control system
including PC,
monitor and keyboard
(Windows-based
system)
Complete
TestWorks®
operating and data
analysis software
Color ink jet printer
Features and Benefits
Fast, accurate nanomechanical
characterization
Fast and accurate generation
of real-time test results
No cutting saves time, cost
Full testing automation—instrument
runs unattended
Automated reporting of test
results in both Microsoft®
Word and Microsoft® Excel.
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The most robust and comprehensive indentation system available
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Presented with a need to provide a fast and
reliable method to acquire mechanical data on
uncut silicon wafers, our engineers developed
an aggressive solution—NANO Indenter XPW.
Equipped with a sample stage supporting test
specimens with diameters up to 300 mm, it
accomodates nearly all industry needs.
Based on proven NANO Indenter technology,
the XPW characterizes surfaces down to the level
of a few nanometers. Properties such as hardness
and modulus of elasticity at this scale can
have significant effect on yield, performance,
and longevity of semiconductor devices. As
a singular system, it features robust design,
easily-used software interface that simplifies
testing, and quick-and-clean specimen loading.
With its 23-bit electronics and exceptional
data-sampling rates, the NANO Indenter XPW
provides you with the most accurate data available
on instrumented indentation systems.
Like other NANO Indenter systems, the XPW
works by making a controlled indentation
with its diamond indenter tip. With indenter
displacement continuously monitored, it provides
hardness of the test specimen, Young’s
modulus, fracture behavior, and other mechancial
properties data calculations.
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The Nano Indenter XPW can be configured with an optional vacuum sample mounting system, shown here with the 6-inch wafer mounting tray.
The NANO Indenter XPW is software-controlled
and easy to use. Operators need
only decide where to put the indentations
and what experiments to perform at
those positions. The XPW is capable of
automated testing, ensuring that each test
is consistent, appropriate, and accurate.
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Download XPW PDF
Technical Specs
Contact MTS
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